Materials Sciences and Applications
Vol.11 No.5(2020), Paper ID 100007, 11
pages
DOI:10.4236/msa.2020.115019
Epoxy Methacrylate Resin as Binder Polymer for Black Negative-Tone Photoresists
Genggongwo Shi, Kyeongha Baek, Seon Hong Ahn, Jun Bae, Jeseob Kim, Lee Soon Park
CCTech. Co. Ltd., Hwaseong, South Korea
School of Material Science and Engineering, Ulsan National Institute of Science and Technology (UNIST), Ulsan, South Korea
Duksan Neolux Co., Ltd., Cheonan, South Korea
Duksan Neolux Co., Ltd., Cheonan, South Korea
CCTech. Co. Ltd., Hwaseong, South Korea
School of Material Science and Engineering, Ulsan National Institute of Science and Technology (UNIST), Ulsan, South Korea
Copyright © 2020 Genggongwo Shi, Kyeongha Baek, Seon Hong Ahn, Jun Bae, Jeseob Kim, Lee Soon Park et al. This is
an open access article distributed under the Creative Commons Attribution
License, which permits unrestricted use, distribution, and reproduction in any
medium, provided the original work is properly cited.
How to Cite this Article
Shi, G. , Baek, K. , Ahn, S. , Bae, J. , Kim, J. and Park, L. (2020) Epoxy Methacrylate Resin as Binder Polymer for Black Negative-Tone Photoresists.
Materials Sciences and Applications,
11, 285-295. doi:
10.4236/msa.2020.115019.