Author(s)

Vu Van Hung¹, Le Thi Thanh Huong², Dang Thanh Hai³

¹University of Education, VNU Hanoi, Hanoi, Vietnam.
²Hai Phong University, Haiphong, Vietnam.
³Vietnam Education Publishing House, Hanoi, Vietnam.

The moment method in statistical (SMM) dynamics is used to study the thermodynamic quantities of ZrO₂ thin films taking into account the anharmonicity effects of the lattice vibrations. The average lattice constant, thermal expansion coefficient and specific heats at the constant volume of ZrO₂ thin films are calculated as a function of temperature, pressure and thickness of thin film. SMM calculations are performed using the Buckingham potential for the ZrO₂ thin films. In the present study, the influence of temperature, pressure and the size on the thermodynamic quantities of ZrO₂ thin film have been studied using three different interatomic potentials. We discuss temperature and thickness dependences of some thermodynamic quantities of ZrO₂ thin films and we compare our calculated results with those of the experimental results.

Thin Film, Zirconia, Lattice Constant, Thermal Expansion Coefficient, Specific Heats at the Constant Volume, Statistical Moment Method

Hung, V. , Huong, L. and Hai, D. (2018) Investigation of Thermodynamic Properties of Zirconia Thin Films by Statistical Moment Method. Materials Sciences and Applications, 9, 949-964. doi: 10.4236/msa.2018.912068.