Journal of Modern Physics

Vol.5 No.8(2014), Paper ID 46359, 8 pages

DOI:10.4236/jmp.2014.58070

 

Numerical Calculations of Some Plasma Parameters of the Capacitively Coupled RF Discharge

 

Mohamed Ali Hassouba, Ahmed Rida Galaly, Usama Mohamed Rashed

 

Applied Physics Department, Faculty of Applied Sciences, Taibah University, Medina, KSA
Engineering Science Dept, Faculty of Community, Umm Al-Qura University, Mecca, KSA
Physics Department, Faculty of Sciences, Alazhar University, Cairo, Egypt

 

Copyright © 2014 Mohamed Ali Hassouba, Ahmed Rida Galaly, Usama Mohamed Rashed et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

 

How to Cite this Article


Hassouba, M. , Galaly, A. and Rashed, U. (2014) Numerical Calculations of Some Plasma Parameters of the Capacitively Coupled RF Discharge. Journal of Modern Physics, 5, 591-598. doi: 10.4236/jmp.2014.58070.

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