Applied Physics Department, Faculty of Applied Sciences, Taibah University, Medina, KSA
Engineering Science Dept, Faculty of Community, Umm Al-Qura University, Mecca, KSA
Physics Department, Faculty of Sciences, Alazhar University, Cairo, Egypt
Copyright © 2014 Mohamed Ali Hassouba, Ahmed Rida Galaly, Usama Mohamed Rashed et al. This is
an open access article distributed under the Creative Commons Attribution
License, which permits unrestricted use, distribution, and reproduction in any
medium, provided the original work is properly cited.
How to Cite this Article
Hassouba, M. , Galaly, A. and Rashed, U. (2014) Numerical Calculations of Some Plasma Parameters of the Capacitively Coupled
RF Discharge.
Journal of Modern Physics,
5, 591-598. doi:
10.4236/jmp.2014.58070.