Journal of Materials Science and Chemical Engineering
Vol.6 No.1(2018), Paper ID 81573, 7
pages
DOI:10.4236/msce.2018.61004
Surface Roughness of SiGe/Si(110) Formed by Stress-Induced Twins and the Solution to Produce Smooth Surface
Junji Yamanaka, Mai Shirakura, Chiaya Yamamoto, Naoto Utsuyama, Kei Sato, Takane Yamada, Kosuke O. Hara, Keisuke Arimoto, Kiyokazu Nakagawa
Center for Instrumental Analysis, University of Yamanashi, Kofu, Japan
Center for Instrumental Analysis, University of Yamanashi, Kofu, Japan
Center for Instrumental Analysis, University of Yamanashi, Kofu, Japan
Center for Crystal Science and Technology, University of Yamanashi, Kofu, Japan
Center for Crystal Science and Technology, University of Yamanashi, Kofu, Japan
Center for Crystal Science and Technology, University of Yamanashi, Kofu, Japan
Center for Crystal Science and Technology, University of Yamanashi, Kofu, Japan
Center for Crystal Science and Technology, University of Yamanashi, Kofu, Japan
Center for Crystal Science and Technology, University of Yamanashi, Kofu, Japan
Center for Creative Technology, University of Yamanashi, Kofu, Japan
Copyright © 2018 Junji Yamanaka, Mai Shirakura, Chiaya Yamamoto, Naoto Utsuyama, Kei Sato, Takane Yamada, Kosuke O. Hara, Keisuke Arimoto, Kiyokazu Nakagawa et al. This is
an open access article distributed under the Creative Commons Attribution
License, which permits unrestricted use, distribution, and reproduction in any
medium, provided the original work is properly cited.
How to Cite this Article
Yamanaka, J. , Shirakura, M. , Yamamoto, C. , Utsuyama, N. , Sato, K. , Yamada, T. , Hara, K. , Arimoto, K. and Nakagawa, K. (2018) Surface Roughness of SiGe/Si(110) Formed by Stress-Induced Twins and the Solution to Produce Smooth Surface.
Journal of Materials Science and Chemical Engineering,
6, 25-31. doi:
10.4236/msce.2018.61004.