National Nano Device Laboratories, National Applied Research Laboratories, Taipei City
National Nano Device Laboratories, National Applied Research Laboratories, Taipei City
Department of Materials Science and Engineering, National Chiao Tung University, Hsinchu
Department of Materials Science and Engineering, National Chiao Tung University, Hsinchu
AUO Crystal Corporation, Taichung City
AUO Crystal Corporation, Taichung City
Copyright © 2017 Kun-Lin Lin, Yi-Ling Jian, Che-Yu Lin, Chien-Cheng Lin, Yih-Rong Luo, Chien-Chia Tseng et al. This is
an open access article distributed under the Creative Commons Attribution
License, which permits unrestricted use, distribution, and reproduction in any
medium, provided the original work is properly cited.
How to Cite this Article
Lin, K. , Jian, Y. , Lin, C. , Lin, C. , Luo, Y. and Tseng, C. (2017) Identification of Grown-In Defects in CZ Silicon after Cu Decoration.
Microscopy Research,
5, 11-19. doi:
10.4236/mr.2017.52002.