Unique Pulsed-Laser Deposition Production of Anatase and Rutile TiO2 on Al2O3

HTML  XML Download Download as PDF (Size: 719KB)  PP. 19-31  
DOI: 10.4236/csta.2018.72002    965 Downloads   2,646 Views  Citations

ABSTRACT

Two pure hexagonal phases of titanium dioxide, anatase and rutile, were grown on c-cut Al2O3 substrates via pulsed-laser deposition by changing only the growth and annealing conditions, but without changing the substrate, target, or working gas. Purity of each phase was confirmed by x-ray diffraction, the quality of each film was studied using atomic force microscopy and scanning electron microscopy, and the interface between each substrate and film was studied using x-ray photoelectron spectroscopy. A binding layer of Ti2O3 was found to explain anatase growth under the very large lattice mismatch conditions.

Share and Cite:

Gordienko, A. and Kaye, A. (2018) Unique Pulsed-Laser Deposition Production of Anatase and Rutile TiO2 on Al2O3. Crystal Structure Theory and Applications, 7, 19-31. doi: 10.4236/csta.2018.72002.

Copyright © 2024 by authors and Scientific Research Publishing Inc.

Creative Commons License

This work and the related PDF file are licensed under a Creative Commons Attribution 4.0 International License.