PECVD - Articles - Scientific Research Publishing

Opto-Structural Properties of Silicon Nitride Thin Films Deposited by ECR-PECVD (Articles)

Hicham Charifi, Abdelilah Slaoui, Jean Paul Stoquert, Hassan Chaib, Abdelkrim Hannour

World Journal of Condensed Matter Physics Vol.6 No.1，December 30, 2015

DOI: 10.4236/wjcmp.2016.61002 5,382 Downloads 7,031 Views Citations
IR Spectroscopic Study of Silicon Nitride Films Grown at a Low Substrate Temperature Using Very High Frequency Plasma-Enhanced Chemical Vapor Deposition (Articles)

Shin-ichi Kobayashi

World Journal of Condensed Matter Physics Vol.6 No.4，November 2, 2016

DOI: 10.4236/wjcmp.2016.64027 3,435 Downloads 5,473 Views Citations
Low Temperature Formation of Silver and Silver-Copper Alloy Nano-Particles Using Plasma Enhanced Hydrogenation and Their Optical Properties (Articles)

Zeinab Kiani, Yaser Abdi, Ezatollah Arzi

World Journal of Nano Science and Engineering Vol.2 No.3，September 28, 2012

DOI: 10.4236/wjnse.2012.23018 5,697 Downloads 9,368 Views Citations
Deposition of Titanium Layer on Steel Substrate Using PECVD Method: A Parametric Study (Articles)

Haman Hedaiatmofidi, Alireza Sabour Rouh Aghdam, Shahrokh Ahangarani, Mansour Bozorg, Mahboube Azadi, Maryam Valiei

Materials Sciences and Applications Vol.5 No.3，March 17, 2014

DOI: 10.4236/msa.2014.53018 4,479 Downloads 6,458 Views Citations
This article belongs to the Special Issue on Research on Coatings
Low Temperature Growth of Hydrogenated Silicon Prepared by PECVD from Argon Diluted Silane Plasma (Articles)

Rachid Amrani, Pascale Abboud, Larbi Chahed, Yvan Cuminal

Crystal Structure Theory and Applications Vol.1 No.3，December 31, 2012

DOI: 10.4236/csta.2012.13012 5,647 Downloads 9,893 Views Citations
Elaboration and Magnetic Properties of Cobalt-Palladium Magnetic Nanowires Encapsulated in Carbon Nanotubes (Articles)

Olivier Rousseau, Cynthia Locard, Aïchata Kane, Yves Roussigné, Samir Farhat, Salim Mourad Chérif

J. of Surface Engineered Materials and Advanced Technology Vol.7 No.1，December 22, 2016

DOI: 10.4236/jsemat.2017.71001 1,924 Downloads 3,241 Views Citations
Creation and Evaluation of Construction Guidelines Using CFD for Low Pressure Plasma Gas Feed-in Systems to Homogenize the Precursor Gas Flow (Articles)

Gustavo Simiema de Freitas Barbosa, Klaus Vissing, Bernd Mayer

Open Journal of Fluid Dynamics Vol.6 No.4，December 26, 2016

DOI: 10.4236/ojfd.2016.64029 1,736 Downloads 3,105 Views Citations
The Effect of Tin on PECVD-Deposited Germanium Sulfide Thin Films for Resistive RAM Devices (Articles)

Rene Rodriguez, Benjamin Poulter, Mateo Gonzalez, Fadil Ali, Lisa D. Lau, McKenzie Mangun

Materials Sciences and Applications Vol.8 No.2，February 7, 2017

DOI: 10.4236/msa.2017.82012 1,904 Downloads 3,118 Views Citations
Thin Film Encapsulation at Low Temperature Using Combination of Inorganic Dyad Layers and Spray Coated Organic Layer (Articles)

Sandeep Kumar, Monica Katiyar

Journal of Encapsulation and Adsorption Sciences Vol.7 No.4，December 5, 2017

DOI: 10.4236/jeas.2017.74011 1,401 Downloads 3,192 Views Citations
Introduction of a New Baffle-Plate Concept to Control the Gas Flow Behavior in a Large Volume PECVD Chamber (Articles)

Gustavo Simiema de Freitas Barbosa, Klaus Vissing, Bernd Mayer

Open Journal of Fluid Dynamics Vol.8 No.2，June 11, 2018

DOI: 10.4236/ojfd.2018.82011 1,412 Downloads 3,829 Views Citations
A Supersonic Plasma Jet Source for Controlled and Efficient Thin Film Deposition (Articles)

Ilaria Biganzoli, Francesco Fumagalli, Fabio Di Fonzo, Ruggero Barni, Claudia Riccardi

Journal of Modern Physics Vol.3 No.10A，October 31, 2012

DOI: 10.4236/jmp.2012.330200 5,184 Downloads 8,320 Views Citations
This article belongs to the Special Issue on Fusion and Plasma Physics
Amorphous-Nanocrystalline Transition in Silicon Thin Films Obtained by Argon Diluted Silane PECVD (Articles)

Rachid Amrani, Frederic Pichot, Larbi Chahed, Yvan Cuminal

Crystal Structure Theory and Applications Vol.1 No.3，December 31, 2012

DOI: 10.4236/csta.2012.13011 4,932 Downloads 9,186 Views Citations

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