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Yoo, Y.W., Jeon, W., Lee, W., An, C.H., Kim, S.K. and Hwang, C.S. (2014) Structure and Elec-trical Properties of Al-Doped HfO2 and ZrO2 Films Grown via Atomic Layer Depo-sition on Mo Electrodes. ACS Applied Materials Interfaces, 6, 22474-22482.
https://doi.org/10.1021/am506525s

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