TITLE:
Improvement of the Mass Spectrometry Process on an Ion Implantation
AUTHORS:
José Lopes, Jorge Rocha, Luís Redondo, Francisco Alegria
KEYWORDS:
Ion Implanter, LabVIEW, Mass Spectrum
JOURNAL NAME:
Open Journal of Optimization,
Vol.5 No.1,
March
9,
2016
ABSTRACT: Mass
spectrometry is an essential part of ion implantation. Therefore, in order to guarantee
beam purity avoiding contamination of the implanted samples, a system was
developed for the high current implanter at the Laboratory of Accelerators and
Radiation Technologies (LATR) at the Instituto Superior Técnico. The system
presented and discussed in this paper was developed using a LabVIEW code and
uses a PC to control and display the mass spectrum. It also permits to save all
data acquired for posterior analysis. In order to show some capabilities of
this system, some experimental results are presented.