Phase Transformations in PZT Thin Films Prepared by Polymeric Chemical Method

Elton C. Lima, Eudes Borges Araújo

Faculdade de Engenharia de Ilha Solteira, Departamento de Física e Química, UNESP—Universidade Estadual Paulista, Ilha Solteira, Brazil.

DOI: 10.4236/ampc.2012.23027                

Abstract

Lead zirconate titanate Pb(Zr_0.50Ti_0.50)O₃ (PZT) thin films were deposited by a polymeric chemical method on Pt(111)/ Ti/SiO2/Si substrates to understand the mechanisms of phase transformations in these films. PZT films pyrolyzed at temperatures higher than 350℃ present a coexistence of pyrochlore and perovskite phases, while only perovskite phase is present in films pyrolyzed at temperatures lower than 300℃. For films where the pyrochlore and perovskite phase coexists the amount of pyrochlore phase decreases from top surface to the bottom film-electrode interface and the PZT structure near top surface are Ti-rich compositions while near the bottom film-electrode interface the compositions are Zr-rich. For pyrochlore-free PZT thin film, a small (100) orientation tendency near the film-electrode interface was observed.

Keywords

PZT; Thin Films; Phase Transformation

Conflicts of Interest

The authors declare no conflicts of interest.

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