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Choi, W., Kim, H.Y., Jeon, J.W., Chang, W.S. and Cho, S.-H. (2017) Vibration-Assisted Femtosecond Laser Drilling with Controllable Taper Angles for AMOLED Fine Metal Mask Fabrication. Materials, 10, 212.
https://doi.org/10.3390/ma10020212

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