TITLE:
Mathematical Modeling and Experimental Validation of Mixed Metal Oxide Thin Film Deposition by Spray Pyrolysis
AUTHORS:
S. M. Navid Khatami, Olusegun J. Ilegbusi, Leonid I. Trakhtenberg
KEYWORDS:
ZnO Oxide Film, Mixed Metal Oxides, Film Growth, Modeling, Spray Pyrolysis
JOURNAL NAME:
Materials Sciences and Applications,
Vol.6 No.1,
January
13,
2015
ABSTRACT: The deposition of metal oxide films using Spray Pyrolysis Technique (SPT) is investigated through mathematical and physical modeling. A comprehensive model is developed in the processes including atomization, spray, evaporation, chemical reaction and deposition. The predicted results including particle size and film thickness are compared with the experimental data obtained in a complementary study. The predicted film thickness is in a good agreement with the measurements when the temperature is high enough for the chemical reaction to proceed. The model also adequately predicts the size distribution when the nanocrystals are well-structured at controlled temperature and concentration.