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M. Miyake, J.F. Scott, X J. Lou, F.D. Morrison, T. Nonaka, S. Motoyama, T. Tatsuta and O. Tsuji, “Submicron three-dimensional trenched electrodes and capacitors for DRAMs and FRAMs: Fabrication and electrical testing”, Journal of Applied Physics, Vol. 104, No. 6, 2008, 064112. doi:10.1063/1.2981197

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