Division Microrobotics and Control Engineering, University Oldenburg, Oldenburg, Germany
Group Automated Nanohandling, OFFIS, Institute for Information Technology, Oldenburg, Germany
Group Automated Nanohandling, OFFIS, Institute for Information Technology, Oldenburg, Germany
Division Microrobotics and Control Engineering, University Oldenburg, Oldenburg, Germany
Institutd’Electronique, de Microélectroniqueet de Nanotechnologie, CNRS/University of Lille, Lille, France
Copyright © 2016 F. T. von Kleist-Retzow, T. Tiemerding, P. Elfert, O. C. Haenssler et al. This is
an open access article distributed under the Creative Commons Attribution
License, which permits unrestricted use, distribution, and reproduction in any
medium, provided the original work is properly cited.
How to Cite this Article
Kleist-Retzow, F. , Tiemerding, T. , Elfert, P. and Haenssler, O. (2016) Automated Calibration of RF On-Wafer Probing and Evaluation of Probe Misalignment Effects Using a Desktop Micro-Factory.
Journal of Computer and Communications,
4, 61-67. doi:
10.4236/jcc.2016.43009.