Materials Sciences and Applications

Vol.2 No.6(2011), Paper ID 5384, 10 pages

DOI:10.4236/msa.2011.26078

 

Nanosensitive Silicon Microprobes for Mechanical Detection and Measurements

 

Jan M Łysko, Piotr Dumania, Paweł Janus, Mirosław Grodner, Helena Kłos, Karina Skwara, Piotr Grabiec

 

 

Copyright © 2011 Jan M Łysko, Piotr Dumania, Paweł Janus, Mirosław Grodner, Helena Kłos, Karina Skwara, Piotr Grabiec et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

 

How to Cite this Article


J. Łysko, P. Dumania, P. Janus, M. Grodner, H. Kłos, K. Skwara and P. Grabiec, "Nanosensitive Silicon Microprobes for Mechanical Detection and Measurements," Materials Sciences and Applications, Vol. 2 No. 6, 2011, pp. 582-591. doi: 10.4236/msa.2011.26078.

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