Materials Sciences and Applications
Vol.2 No.6(2011), Paper ID 5384, 10 pages
DOI:10.4236/msa.2011.26078
Nanosensitive Silicon Microprobes for Mechanical Detection and Measurements
Jan M Łysko, Piotr Dumania, Paweł Janus, Mirosław Grodner, Helena Kłos, Karina Skwara, Piotr Grabiec
Copyright © 2011 Jan M Łysko, Piotr Dumania, Paweł Janus, Mirosław Grodner, Helena Kłos, Karina Skwara, Piotr Grabiec et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
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