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Article citations


W. C. Tang, T.-C. H. Nguyen, M. W. Judy and R. T. Howe, “Electrostatic-Comb Drive of Lateral Polysilicon Resonators,” Sensors and Actuators A, Vol. 21, No. 1-3, 1990, pp. 328-331.

has been cited by the following article:

  • TITLE: Towards Quantitative Characterisation of the Small Force Transducer Used in Nanoindentation Instruments

    AUTHORS: Zhi Li, Uwe Brand

    KEYWORDS: Nanometrology; Nanoindentation Instrument; Nano-Force Transducer; Microelectromechanical Systems; Nano-Force Calibration

    JOURNAL NAME: Modern Instrumentation, Vol.2 No.4, September 30, 2013

    ABSTRACT: Quantitative characterization of the mechanical properties of materials in micro-/nano-scale using depth-sensing indentation technique demands high performance of nanoindentation instruments in use. In this paper, the efforts to calibrate the capacitive force transducer of a commercial nanoindentation instrument are presented, where the quasi-static characteristic of the force transducer has been calibrated by a precise compensation balance with a resolution of ~1 nN. To investigate the dynamic response of the transducer, an electrostatic MEMS (Micro-Electro-Mechanical System) based on nano-force transfer standard with nano-Newton (10-9 Newton) resolution and a bandwidth up to 6 kHz have been employed. Preliminary experimental results indicate that 1) the force transducer under calibration has a probing force uncertainty less than 300 nN (1σ) in the calibration range of 1 mN; 2) the transient duration at contact points amounts to 10 seconds; 3) the overshoot of engagement is pre-load dependent.