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T. Wang, X. Diao and X. Wang, “Inhomogeneous Optoelectronic and Microstructure Property Distribution across the Substrate of ZnO:Al Films Deposited by Room Temperature Magnetron Sputtering,” Applied Surface Science, Vol. 257, No. 23, 2011, pp. 9773-9779. doi:10.1016/j.apsusc.2011.06.010

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