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T. Takahagi, S. Shingubara, H. Sakaue, K. Hoshino and H. Yashima, “Study on Adsorption Behavior of Organic Contaminations on Silicon Surface by Gas Chromatography/Mass Spectrometry,” Japanese Journal of Applied Physics, Vol. 35, No. 7A, 1996, pp. L818-L821.

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