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S. D. Gendt, D. M. Knotter, K. Kenis, M. Depas, M. Meuris, P. W. Mertens and M. M. Heyns, “Impact of Organic Contamination on Thin Gate Oxide Quality,” Japanese Journal of Applied Physics, Vol. 37, No. 9A, 1998, pp. 4649-4655. doi:10.1143/JJAP.37.4649

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