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F. Herrault, B. C. Yen, C.-H Ji, Z. S. Spakovszky J. H. Lang and M. G. Allen, “Fabri-cation and Performance of Silicon-Embedded Permanent-Magnet Microgenerators,” Journal of Microelectromechanical Systems, Vol. 19, No. 1, 2010, pp. 4-13. doi:10.1109/JMEMS.2009.2036583

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