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C. Y. Wang, V. Cimalla, H. Romanus, T. Kups, M. Niebelschutz and O. Ambacher, “Tuning of Electrical and Structural Properties of Indium Oxide Films Grown by Metal Organic Chemical Vapor Deposition,” Thin Solid Films, Vol. 515, No. 16, 2007, pp. 6611-6614. doi:10.1016/j.tsf.2006.11.079

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