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Ueki, T., Itsumi, M. and Takeda, T. (1997) Octahedral Void Structure Observed in Grown-In Defects in the Bulk of Standard Czochralski-Si for MOS LSIs. Japanese Journal of Applied Physics, 36, 1781-1785.
https://doi.org/10.1143/JJAP.36.1781
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