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Dameron, A.A., Davidson, S.D., Burton, B.B., Carcia, P.F., MacLean, R.S. and George, S.M. (2008) Gas Diffusion Barriers on Polymer Using Multi Layers Fabricated by Al2O3 and Rapid SiO2 Atomic Layer Deposition. Journal of Physical Chemistry C, 112, 4573-4580.
https://doi.org/10.1021/jp076866+

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