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Günther, M., Bialuch, I., Peter, S., Bewilogua, K. and Richter, F. (2011) High Rate Deposition of Hard a-C:H Films Using Microwave Excited Plasma Enhanced CVD. Surface and Coatings Technology, 205, S94-S98.
http://dx.doi.org/10.1016/j.surfcoat.2010.12.047

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