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Schmidt, S., Goyenola, C., Gueorguiev, G.K., Jensen, J., Greczynski, G., Ivanov, I.G., Czigány, Zs. and Hultman, L. (2013) Reactive High Power Impulse Magnetron Sputtering of CFx Thin Films in Mixed Ar/CF4 and Ar/C4F8 Discharges. Thin Solid Films, 542, 21-30. http://dx.doi.org/10.1016/j.tsf.2013.05.165

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