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Muradkabilov, D.M., Tashmukhamedova, D.A. and Umirzakova B.E. (2013) Applying Low-Energy Ion Implantation in the Creation of Nanocontacts on the Surface of Ultrathin Semiconductor Films. Journal of Surface Investigation. X-Ray, Synchrotron and Neutron Techniques, 7, 967-971.
https://doi.org/10.1134/S1027451013050376

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