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H. Takao, K. Sawada and M. Ishida, “Monolithic Silicon Smart Tactile Image Sensor with Integrated Strain Sensor Array on Pneumatically Swollen Single-Diaphragm Structure,” IEEE Transactions on Electron Devices, Vol. 53, No. 5, 2006, pp. 1250-1259. doi:10.1109/TED.2006.872698

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