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M. Olfatnia, Z. Shen, J. M. Miao, L. S. Ong and T. Xu, et al., “Medium Damping Influences on the Resonant Frequency and Quality Factor of Piezoelectric Circular Microdiaphragm Sensors,” Journal Micromechanics Microengineering, Vol. 21, No. 4, 2011, Article ID: 45002. doi:10.1088/0960-1317/21/4/045002

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