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M. Olfatnia, T. Xu, J. M. Miao, L. S. Ong and X. M. Jing, et al., “Piezoelectric Circular Microdiaphragm Based Pressure Sensors,” Sensors and Actuators A: Physical, Vol. 163, No. 1, 2010, pp. 32-36. doi:10.1016/j.sna.2010.06.016

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