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M. Orita, H. Hiramatsu, H. Ohta, M. Hirano and H. Hosono, “Preparation of Highly Conductive, Deep Ultraviolet Transparent β-Ga2O3 Thin Film at Low Deposition Temperatures,” Thin Solid Films, Vol. 411, No. 1, 2002, pp. 134-139. doi:10.1016/S0040-6090(02)00202-X,

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