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Arai, T., Kamimura, K., Yamamoto, C., Shirakura, M., Arimoto, K., Yamanaka, J., Nakagawa, K., Takamatsu, T., Ogino, M., Tachioka, M. and Nakazawa, H. (2017) Ohmic Contact Formation for n+ 4H-SiC Substrate by Selective Heating Method Using Hydrogen Radical Irradiation. Journal of Materials Science and Chemical Engineering, 5, 35-41. https://doi.org/10.4236/msce.2017.51005

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