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has been cited by the following article:

• TITLE: Improvement of the Mass Spectrometry Process on an Ion Implantation

  AUTHORS: José Lopes, Jorge Rocha, Luís Redondo, Francisco Alegria

  KEYWORDS: Ion Implanter, LabVIEW, Mass Spectrum

  JOURNAL NAME: Open Journal of Optimization, Vol.5 No.1, March 9, 2016

  ABSTRACT: Mass spectrometry is an essential part of ion implantation. Therefore, in order to guarantee beam purity avoiding contamination of the implanted samples, a system was developed for the high current implanter at the Laboratory of Accelerators and Radiation Technologies (LATR) at the Instituto Superior Técnico. The system presented and discussed in this paper was developed using a LabVIEW code and uses a PC to control and display the mass spectrum. It also permits to save all data acquired for posterior analysis. In order to show some capabilities of this system, some experimental results are presented.