Article citationsMore>>

H. Lorenz, M. Despont, N. Fahrni, J. Brugger, P. Vettiger and P. Renaud, “High-Aspect-Ratio, Ultrathick, Negative-Tone Near-UV Photoresist and Its Applications for MEMS,” Sensors and Actuators A: Physical, Vol. 64, No. 1, 1998, pp. 33-39.
http://dx.doi.org/10.1016/S0924-4247(98)80055-1

has been cited by the following article:

Follow SCIRP
Twitter Facebook Linkedin Weibo
Contact us
+1 323-425-8868
customer@scirp.org
WhatsApp +86 18163351462(WhatsApp)
Click here to send a message to me 1655362766
Paper Publishing WeChat
Free SCIRP Newsletters
Copyright © 2006-2024 Scientific Research Publishing Inc. All Rights Reserved.
Top