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Preparation of Cr2O3-Ta2O5 Composites Using RF Magnetron Sputtering

DOI: 10.4236/oalib.1102094    601 Downloads   814 Views  

ABSTRACT

We prepared Cr2O3-Ta2O5 composite films using our RF magnetron co-sputtering method for the first time. X-ray diffraction (XRD) patterns and photoluminescence (PL) spectra of the films annealed at 700℃, 800℃, 900℃, and 1000℃ were evaluated. From their XRD patterns, the Cr2O3-Ta2O5 film annealed at 700℃ seemed to be almost amorphous, and the one annealed at 800℃ seemed to be hexagonal Ta2O5 doped with Cr. In addition, the Cr2O3-Ta2O5 films annealed at 900℃ and 1000℃ seemed to include tetragonal CrTaO4 phases. Furthermore, it seems that almost no defect exists in our Cr2O3-Ta2O5 composite films annealed at 700℃ - 1000℃ because their PL spectra have no defect-related peak. We thus find that good-quality Cr2O3-Ta2O5 composite films including CrTaO4 can be obtained using our very simple co-sputtering method and subsequent annealing above 900℃.

Conflicts of Interest

The authors declare no conflicts of interest.

Cite this paper

Miura, K. , Osawa, T. , Yokota, Y. and Hanaizumi, O. (2015) Preparation of Cr2O3-Ta2O5 Composites Using RF Magnetron Sputtering. Open Access Library Journal, 2, 1-5. doi: 10.4236/oalib.1102094.

References

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http://dx.doi.org/10.1016/j.optmat.2010.08.018
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http://dx.doi.org/10.1587/elex.6.1676
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http://dx.doi.org/10.4028/www.scientific.net/KEM.459.32
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http://dx.doi.org/10.2150/jlve.36.64
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http://dx.doi.org/10.4028/www.scientific.net/KEM.534.154
[9] Miura, K., Osawa, T., Yokota, Y., Suzuki, T. and Hanaizumi, O. (2014) Fabrication of Tm-Doped Ta2O5 Thin Films Using a Co-Sputtering Method. Results in Physics, 4, 148-149.
http://dx.doi.org/10.1016/j.rinp.2014.08.011
[10] Miura, K., Osawa, T., Yokota, Y. and Hanaizumi, O. (2014) Fabrication and Evaluation of Ta2O5:Y2O3 Co-Sputtered Thin Films. Results in Physics, 4, 185-186.
http://dx.doi.org/10.1016/j.rinp.2014.09.004
[11] Miura, K., Osawa, T., Suzuki, T., Yokota, Y. and Hanaizumi, O. (2015) Yellow Light Emission from Ta2O5:Er, Eu, Ce Thin Films Deposited Using a Simple Co-Sputtering Method. Results in Physics, 5, 26-27.
http://dx.doi.org/10.1016/j.rinp.2014.11.003
[12] Miura, K., Osawa, T., Suzuki, T., Yokota, Y. and Hanaizumi, O. (2015) Fabrication and Evaluation of Green-Light Emitting Ta2O5:Er, Ce Co-Sputtered Thin Films. Results in Physics, 5, 78-79.
http://dx.doi.org/10.1016/j.rinp.2015.02.002
[13] Miura, K., Kano, K., Arai, Y. and Hanaizumi, O. (2015) Preparation of Light-Emitting Ytterbium-Doped Tantalum-Oxide Thin Films Using a Simple Co-Sputtering Method. Materials Sciences and Applications, 6, 209-213.
http://dx.doi.org/10.4236/msa.2015.62024
[14] Miura, K., Arai, Y., Kano, K. and Hanaizumi, O. (2015) Fabrication of Erbium and Ytterbium Co-Doped Tantalum-Oxide Thin Films Using Radio-Frequency Co-Sputtering. Materials Sciences and Applications, 6, 343-347.
http://dx.doi.org/10.4236/msa.2015.65039
[15] Miura, K., Osawa, T., Yokota, Y., Suzuki, T. and Hanaizumi, O. (2015) Photoluminescence Properties of Thulium and Cerium Co-Doped Tantalum-Oxide Films Prepared by Radio-Frequency Co-Sputtering. Materials Sciences and Applications, 6, 263-268.
http://dx.doi.org/10.4236/msa.2015.64031
[16] Miura, K., Suzuki, T. and Hanaizumi, O. (2015) Observation of Violet-Light Emission Band for Thulium-Doped Tantalum-Oxide Films Produced by Co-Sputtering. Materials Sciences and Applications, 6, 656-660.
http://dx.doi.org/10.4236/msa.2015.67067
[17] Miura, K., Arai, Y. and Hanaizumi, O. (2015) Observation of Blue-Light Emission Band from Eu-Doped Ta2O5 Thin Films Prepared Using Co-Sputtering. Materials Sciences and Applications, 6, 676-680.
http://dx.doi.org/10.4236/msa.2015.67069
[18] Miura, K., Suzuki, T. and Hanaizumi, O. (2015) Photoluminescence Properties of Europium and Cerium Co-Doped Tantalum-Oxide Thin Films Prepared Using Co-Sputtering Method. Journal of Materials Science and Chemical Engineering, 3, 30-34.
http://dx.doi.org/10.4236/msce.2015.38005
[19] Miura, K., Osawa, T., Yokota, Y., Hossain, Z. and Hanaizumi, O. (2015) Preparation of CuO-Ta2O5 Composites Using a Simple Co-Sputtering Method. Journal of Materials Science and Chemical Engineering, 3, 47-51.
http://dx.doi.org/10.4236/msce.2015.39006
[20] Korotcenkov, G., Han, S.H. and Cho, B.K. (2013) Material Design for Metal Oxide Chemiresistive Gas Sensors. Journal of Sensor Science and Technology, 22, 1-17.
http://dx.doi.org/10.5369/JSST.2013.22.1.1
[21] Yamaga, M., Henderson, B., O’Donnell, K.P., Trager Cowan, C. and Marshall, A. (1990) Temperature Dependence of the Lifetime of Cr3+ Luminescence in Garnet Crystals I. Applied Physic B, 50, 425-431.
http://dx.doi.org/10.1007/BF00325096
[22] Yamaga, M., Henderson, B., O’Donnell, K.P. and Yue, G. (1990) Temperature Dependence of the Lifetime of Cr3+ Luminescence in Garnet Crystals II. The Case of YGG. Applied Physic B, 51, 132-136.
[23] Schlottig, F., Schreckenbach, J. and Marx, G. (1999) Preparation and Characterisation of Chromium and Sodium Tantalate Layers by Anodic Spark Deposition. Fresenius’ Journal of Analytical Chemistry, 363, 209-211.
http://dx.doi.org/10.1007/s002160051174
[24] Cid, M., Stem, N., Brunetti, C., Beloto, A.F. and Ramos, C.A.S. (1998) Improvements in Anti-Reflection Coatings for High-Efficiency Silicon Solar Cells. Surface and Coatings Technology, 106, 117-120.
http://dx.doi.org/10.1016/S0257-8972(98)00499-X
[25] Hanaizumi, O., Miura, K., Saito, M., Sato, T., Kawakami, S., Kuramochi, E. and Oku, S. (2000) Frontiers Related with Automatic Shaping of Photonic Crystals. IEICE Transactions on Electronics, E83-C, 912-919.
[26] Sato, T., Miura, K., Ishino, N., Ohtera, Y., Tamamura, T. and Kawakami, S. (2002) Photonic Crystals for the Visible Range Fabricated by Autocloning Technique and Their Application. Optical and Quantum Electronics, 34, 63-70.
http://dx.doi.org/10.1023/A:1013382711983
[27] Sanada, T., Wakai, Y., Nakashita, H., Matsumoto, T., Yogi, C., Ikeda, S., Wada, N. and Kojima, K. (2010) Preparationof Eu3+-Doped Ta2O5 Phosphor Particles by Sol-Gel Method. Optical Materials, 33, 164-169.
http://dx.doi.org/10.1016/j.optmat.2010.08.018
[28] Singh, M.K., Fusegi, G., Kano, K., Bange, J.P., Miura, K. and Hanaizumi, O. (2009) Intense Photoluminescence from Erbium-Doped Tantalum Oxide Thin Films Deposited by Sputtering. IEICE Electronics Express, 6, 1676-1682.
http://dx.doi.org/10.1587/elex.6.1676
[29] Bange, J.P., Singh, M.K., Kano, K., Miura, K. and Hanaizumi, O. (2011) Structural Analysis of RF Sputtered Er Doped Ta2O5 Films. Key Engineering Materials, 459, 32-37.
http://dx.doi.org/10.4028/www.scientific.net/KEM.459.32
[30] Miura, K., Arai, Y., Osawa, T. and Hanaizumi, O. (2012) Light-Emission Properties of Europium-Doped Tantalum-Oxide Thin Films Deposited by Radio-Frequency Magnetron Sputtering. Journal of Light & Visual Environment, 36, 64-67.
http://dx.doi.org/10.2150/jlve.36.64
[31] Singh, M.K., Miura, K., Fusegi, G., Kano, K. and Hanaizumi, O. (2013) Visible-Light Emission Properties of Erbium-Doped Tantalum-Oxide Films Produced by Co-Sputtering. Key Engineering Materials, 534, 154-157.
http://dx.doi.org/10.4028/www.scientific.net/KEM.534.154
[32] Miura, K., Osawa, T., Yokota, Y., Suzuki, T. and Hanaizumi, O. (2014) Fabrication of Tm-Doped Ta2O5 Thin Films Using a Co-Sputtering Method. Results in Physics, 4, 148-149.
http://dx.doi.org/10.1016/j.rinp.2014.08.011
[33] Miura, K., Osawa, T., Yokota, Y. and Hanaizumi, O. (2014) Fabrication and Evaluation of Ta2O5:Y2O3 Co-Sputtered Thin Films. Results in Physics, 4, 185-186.
http://dx.doi.org/10.1016/j.rinp.2014.09.004
[34] Miura, K., Osawa, T., Suzuki, T., Yokota, Y. and Hanaizumi, O. (2015) Yellow Light Emission from Ta2O5:Er, Eu, Ce Thin Films Deposited Using a Simple Co-Sputtering Method. Results in Physics, 5, 26-27.
http://dx.doi.org/10.1016/j.rinp.2014.11.003
[35] Miura, K., Osawa, T., Suzuki, T., Yokota, Y. and Hanaizumi, O. (2015) Fabrication and Evaluation of Green-Light Emitting Ta2O5:Er, Ce Co-Sputtered Thin Films. Results in Physics, 5, 78-79.
http://dx.doi.org/10.1016/j.rinp.2015.02.002
[36] Miura, K., Kano, K., Arai, Y. and Hanaizumi, O. (2015) Preparation of Light-Emitting Ytterbium-Doped Tantalum-Oxide Thin Films Using a Simple Co-Sputtering Method. Materials Sciences and Applications, 6, 209-213.
http://dx.doi.org/10.4236/msa.2015.62024
[37] Miura, K., Arai, Y., Kano, K. and Hanaizumi, O. (2015) Fabrication of Erbium and Ytterbium Co-Doped Tantalum-Oxide Thin Films Using Radio-Frequency Co-Sputtering. Materials Sciences and Applications, 6, 343-347.
http://dx.doi.org/10.4236/msa.2015.65039
[38] Miura, K., Osawa, T., Yokota, Y., Suzuki, T. and Hanaizumi, O. (2015) Photoluminescence Properties of Thulium and Cerium Co-Doped Tantalum-Oxide Films Prepared by Radio-Frequency Co-Sputtering. Materials Sciences and Applications, 6, 263-268.
http://dx.doi.org/10.4236/msa.2015.64031
[39] Miura, K., Suzuki, T. and Hanaizumi, O. (2015) Observation of Violet-Light Emission Band for Thulium-Doped Tantalum-Oxide Films Produced by Co-Sputtering. Materials Sciences and Applications, 6, 656-660.
http://dx.doi.org/10.4236/msa.2015.67067
[40] Miura, K., Arai, Y. and Hanaizumi, O. (2015) Observation of Blue-Light Emission Band from Eu-Doped Ta2O5 Thin Films Prepared Using Co-Sputtering. Materials Sciences and Applications, 6, 676-680.
http://dx.doi.org/10.4236/msa.2015.67069
[41] Miura, K., Suzuki, T. and Hanaizumi, O. (2015) Photoluminescence Properties of Europium and Cerium Co-Doped Tantalum-Oxide Thin Films Prepared Using Co-Sputtering Method. Journal of Materials Science and Chemical Engineering, 3, 30-34.
http://dx.doi.org/10.4236/msce.2015.38005
[42] Miura, K., Osawa, T., Yokota, Y., Hossain, Z. and Hanaizumi, O. (2015) Preparation of CuO-Ta2O5 Composites Using a Simple Co-Sputtering Method. Journal of Materials Science and Chemical Engineering, 3, 47-51.
http://dx.doi.org/10.4236/msce.2015.39006
[43] Korotcenkov, G., Han, S.H. and Cho, B.K. (2013) Material Design for Metal Oxide Chemiresistive Gas Sensors. Journal of Sensor Science and Technology, 22, 1-17.
http://dx.doi.org/10.5369/JSST.2013.22.1.1
[44] Yamaga, M., Henderson, B., O’Donnell, K.P., Trager Cowan, C. and Marshall, A. (1990) Temperature Dependence of the Lifetime of Cr3+ Luminescence in Garnet Crystals I. Applied Physic B, 50, 425-431.
http://dx.doi.org/10.1007/BF00325096
[45] Yamaga, M., Henderson, B., O’Donnell, K.P. and Yue, G. (1990) Temperature Dependence of the Lifetime of Cr3+ Luminescence in Garnet Crystals II. The Case of YGG. Applied Physic B, 51, 132-136.
[46] Schlottig, F., Schreckenbach, J. and Marx, G. (1999) Preparation and Characterisation of Chromium and Sodium Tantalate Layers by Anodic Spark Deposition. Fresenius’ Journal of Analytical Chemistry, 363, 209-211.
http://dx.doi.org/10.1007/s002160051174

  
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