The Use of Light Diffracted from Grating Etched onto the Backside Surface of an Atomic Force Microscope Cantilever Increases the Force Sensitivity


A reflecting diffraction grating has been etched onto the backside of a standard cantilever for atomic force microscopy, and the diffracted light has been used to monitor the angular position of the cantilever. It is shown experimentally that for small angles of incidence and for large reflection angles, the force sensitivity can be improved by few times when an appropriate detection scheme based on the position sensitive (duolateral) detector is used. The first demonstration was performed with a one micron period amplitude diffraction grating onto the backside of an Al-coated cantilever etched by a focused ion beam milling for the experiments in air and an analogous 600 nm-period grating for the experiments in air and in water.

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Sekatskii, S. , Mensi, M. , Mikhaylov, A. and Dietler, G. (2013) The Use of Light Diffracted from Grating Etched onto the Backside Surface of an Atomic Force Microscope Cantilever Increases the Force Sensitivity. Journal of Surface Engineered Materials and Advanced Technology, 3, 29-35. doi: 10.4236/jsemat.2013.34A1004.

Conflicts of Interest

The authors declare no conflicts of interest.


[1] D. Sarid, “Scanning Force Microscopy,” Oxford University Press, New York, 1991.
[2] M. Born and E. Wolf, “Principles of Optics,” Pergamon Press, London, 1959.
[3] Japan Patent No. 6-289036, 1994.
[4] A. Garcia-Valenzuela, “Limits of Different Detection Schemes Used in the Optical Beam Deflection Method,” Journal of Applied Physics, Vol. 82, No. 3, 1997, pp. 985-988.
[5] A. Yarai, Y. Fukunaga, K. Sakamoto and T. Nakanishi, “High-Frequency and High-Gain Amplification of Photothermal Beam Deflection Angle Using Cylindrical Reflection Mirror,” Japanese Journal of Applied Physics, Vol. 33, No. 5B, 1994, pp. 3251-3255.
[6] J. Zlatanova, S. M. Lindsay and S. H. Leuba, “Single Molecule Force Spectroscopy in Biology Using the Atomic Force Microscope,” Progress in Biophysics and Molecular Biology, Vol. 74, No. 1-2, 2000, pp. 37-61.
[7] J. W. Weisel, H. Shuman and R. I. Litvinov, “ProteinProtein Unbinding Induced by Force: Single-Molecule Studies,” Current Opinion in Structural Biology, Vol. 13, No. 2, 2003, pp. 227-235.
[8] C. K. Lee, Y. M. Wang, L. S. Huang and S. Lin, “Atomic Force Microscopy: Determination of Unbinding Force, Off Rate and Energy Barrier for Protein—Ligand Interaction,” Micron, Vol. 38, No. 5, 2007, pp. 446-461.
[9] “Two-dimensional PSD,” 2013.
[10] S. K. Sekatskii, M. Favre, G. Dietler, A. G. Mikhailov, D. V. Klinov, S. V. Lukash and S. M. Deyev, “Force Spectroscopy of the Barnase—Barstar Interaction at the Single-Molecule Level,” Journal of Molecular Recognition, Vol. 23, No. 6, 2010, pp. 583-588.
[11] F. Benedetti, C. Micheletti, G. Bussi, S. K. Sekatskii and G. Dietler, “Non-Kinetic Modeling of the Mechanical Unfolding of Multimodular Proteins: Theory and Experiments,” Biophysical Journal, Vol. 101, No. 6, 2011, pp. 1504-1512.
[12] J. B. D. Soole, K. R. Poguntke, A. Scherer, H. P. LeBlanc, C. Chang-Hasnain, J. R. Hayes, C. Caneau, R. Bhat and M. A. Koza, “Wavelength-Selectable Laser Emission from a Multistripe Array Grating Integrated Cavity Laser,” Applied Physics Letters, Vol. 61, No. 23, 1992, pp. 2750-2752.
[13] J. Song, N. Zhu, J.-J. He and S. He, “Etched Diffraction Grating Demultiplexer with Large Free Spectral Range and Large Grating Facets,” IEEE Photonics Technology Letters, Vol. 18, No. 24, 2006, pp. 2695-2697.
[14] D. Fattal, J. Li, Z. Peng, M. Fiorentio and R. G. Beausoleil, “Flat Dielectric Grating Reflectors with Focusing Abilities, Nature Photonics, Vol. 4, No. 7, 2010, pp. 466-470.
[15] G. G. Yaralioglu, A. Atalar, S. R. Manalis and C. F. Quate, “Analysis and Design of an Interdigital Cantilever as a Displacement Sensor,” Journal of Applied Physics, Vol. 83, No. 12, 1998, pp. 7405-7415.
[16] T. Sulchek, R. J. Grow, G. G. Yaralioglu, S. C. Minne, C. F. Quate, S. R. Manalis, A. Kinaz, A. Aydine and A. Alalar, “Parallel Atomic Force Microscopy with Optical Interferometric Detection,” Applied Physics Letters, Vol. 78, No. 12, 2001, pp. 1787-1789.
[17] N. A. Hall and F. L. Degeterkin, “Integrated Optical Inter Ferometric Detection Method for Micromachined Capacitive Acoustic Transducers,” Applied Physics Letters, Vol. 80, No. 20, 2002, pp. 3859-3861.
[18] F. L. Degeterkin, A. G. Onaran, M. Balantekin, W. Lee, N. A. Hall and C. F. Quate, “Sensor for Direct Measurement of Interaction Forces in Probe Microscopy,” Applied Physics Letters, Vol. 87, No. 21, 2005.

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