Millimeter Scale MEMS Air Turbine Generator by Winding Wire and Multilayer Magnetic Ceramic Circuit


This paper provides a new system and concept concerning to MEMS air turbine power generator. The generator was composed of the MEMS air turbine and the magnetic circuit. The magnetic circuit was fabricated by multilayer magnetic ceramic technology and achieved monolithic structure which included high permeability material and three di-mensional helical conductor patterns inside. Although the output power was micro watt class, some features were extracted by comparing to the simple winding wire type magnetic circuit. In the power density measurement, almost same output power density was extracted though the turn number of the winding wire type was more than that of monolithic type. Also the resistance of the conductor was quarter of the winding type. The maximum output voltage and the maximum power of the monolithic generator was 6.2 mV and 1.92 μVA respectively. The DC conductor resistance was 1.2 Ω. The energy density was 0.046 μVA/mm3. The appearance size of the monolithic type was 3.6, 3.4, 3.5 mm, length, width and height respectively.

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A. Iizuka, M. Takato, M. Kaneko, T. Nishi, K. Saito and F. Uchikoba, "Millimeter Scale MEMS Air Turbine Generator by Winding Wire and Multilayer Magnetic Ceramic Circuit," Modern Mechanical Engineering, Vol. 2 No. 2, 2012, pp. 41-46. doi: 10.4236/mme.2012.22006.

Conflicts of Interest

The authors declare no conflicts of interest.


[1] A. H. Epstein, and S. D. Senturia, “Macro Power from Micro Machinery,” Science, Vol.276, No. 5316, 1997, p. 1211. doi:10.1126/science.276.5316.1211
[2] A. H. Epstein, “Mil-limeter-Scale MEMS Gas Turbine Engines,” Proceedings of ASME Turbo Expo 2003 International Joint Power Generation Conference, Atlanta, 16-19 June 2003, pp. 669-696. doi:10.1115/GT2003-38866
[3] A. Holmes, G. Hong and K. Pullen, “Axial-Flux Permanent Magnet Machines for Micro-power Generation,” Journal of Microelectromechanical Systems, Vol. 14, No. 1, 2005, pp. 54-62. doi:10.1109/JMEMS.2004.839016
[4] S. Das, D. P. Arnold, I. Zana, J. W. Park, J. H. Lang and M. G. Allen, “Multi-Watt Electric-Power from a Micro-fabricated Permanent-Magnet Generator,” 18th IEEE International Conference on Micro Electro Mechanical Systems, 30 January-3 February 2005, pp. 287-290. doi:10.1109/MEMSYS.2005.1453923
[5] H. Raisigel, O. Cugat and J. Delamare, “Permanent Magnet Planar Mi-cro-Generators,” Sensors and Actuators A: Physical, Vol. 130-131, 2006, pp. 438-444. doi:10.1016/j.sna.2005.10.007
[6] D. P. Arnold, F. Herrault, I. Zana. P. Galle, J.-W. Park, S. Das, J. H. Lang and M. G. Allen, “Design Optimization of an 8 W, Microscale, Axial-Flux, Per-manent-Magnet Generator,” Journal of Micromechanics and Microengi neering, Vol. 16, No. 9, 2006, pp. S290-S296. doi:10.1088/0960-1317/16/9/S17
[7] C. Pan and T. Wu, “Development of a Rotary Electro-magnetic Microgenerator,” Journal of Micromechanics and Microengineering, Vol. 17, No. 1, 2007, pp. 120-128. doi:10.1088/0960-1317/17/1/016
[8] B. C. Yen, F. Herrault, K. J. Hillman, M. G. Allen, F. F. Ehrich, S. Jacobson, C.-H. Ji, J. H. Lang, H. Li, Z. S. Spakovszky and D. R. Veazie, “Cha-racterization of A Fully-Integrated Permanent-Magnet Turbine Generator,” Proceedings of PowerMEMS, Sendai, 9-12 No-vember 2008, pp. 121-124.
[9] F. Herrault, C.-H. Ji and M. G. Allen, “Ultraminiaturized, High-Speed, Permanent-Magnet Generators for Milliwatt- Level Power Generation,” Journal of Microelectromechanical Systems, Vol. 17, No. 6, 2008, pp. 1376-1387. doi:10.1109/JMEMS.2008.2004854
[10] C. Pan and Y. Chen, “Application of Low Temperature Co-Fire Ceramic on In-Plane Micro-Generator,” Sensors and Actuators A: Physical, Vol. 144, No. 1, 2008, pp. 144- 153. doi:10.1016/j.sna.2007.12.008
[11] F. Herrault, B. C. Yen, C.-H Ji, Z. S. Spakovszky J. H. Lang and M. G. Allen, “Fabri-cation and Performance of Silicon-Embedded Permanent-Magnet Microgenerators,” Journal of Microelectromechanical Systems, Vol. 19, No. 1, 2010, pp. 4-13. doi:10.1109/JMEMS.2009.2036583
[12] R. Cordero, A. Rivera, M. Neuman, R. Warrington and E. Romero, “Micro-Rotational Electromagnetic Generator for High Speed Applications,” 25th International Conference on Micro Electro Mechanical Systems, Paris, 29 January-2 February 2012, pp. 287-290. doi:10.1109/MEMSYS.2012.6170385
[13] A. J. Blodgett, “A Multilayer Ceramic Multi-Chip Module,” IEEE Transactions on Components, Hybrids, and Manufacturing Technology, San Francisco, 1980, pp. 283- 285. doi:10.1109/TCHMT.1980.1135663

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