Author(s)

José Lopes^1*, Jorge Rocha², Luís Redondo¹, Francisco Alegria³

¹Instituto Superior de Engenharia de Lisboa, Rua Conselheiro Emídio Navarro, Lisbon, Portugal.
²Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Lisbon, Portugal.
³Instituto Superior Técnico and Instituto de Telecomunicações, Lisbon, Portugal.

Mass spectrometry is an essential part of ion implantation. Therefore, in order to guarantee beam purity avoiding contamination of the implanted samples, a system was developed for the high current implanter at the Laboratory of Accelerators and Radiation Technologies (LATR) at the Instituto Superior Técnico. The system presented and discussed in this paper was developed using a LabVIEW code and uses a PC to control and display the mass spectrum. It also permits to save all data acquired for posterior analysis. In order to show some capabilities of this system, some experimental results are presented.

Ion Implanter, LabVIEW, Mass Spectrum

Lopes, J. , Rocha, J. , Redondo, L. and Alegria, F. (2016) Improvement of the Mass Spectrometry Process on an Ion Implantation. Open Journal of Optimization, 5, 31-34. doi: 10.4236/ojop.2016.51004.