Experimental Characterization of ALD Grown Al2O3 Film for Microelectronic Applications ()
Yuxi Wang, Yida Chen, Yong Zhang, Zhaoxin Zhu, Tao Wu, Xufeng Kou, Pingping Ding, Romain Corcolle, Jangyong Kim
Advances in Materials Physics and Chemistry
Vol.11 No.1,
January 27, 2021
DOI:
10.4236/ampc.2021.111002 51 Downloads 124 Views
Citations
This article belongs to the Special Issue on
Thin Film Materials and Its Applications
to be published