Department of Physics, University of Science and Technology of China, Hefei, China
2Institute of Biochemistry and Cell Biology, Shanghai Institutes for Biological Sciences, CAS, Shanghai, China
3National Center for Protein Sciences (Shanghai), Shanghai Institutes for Biological Sciences, CAS, Shanghai, China
Department of Physics, University of Science and Technology of China, Hefei, China
Copyright © 2013 Xiang-Yu Ding, Yu-Xuan Ren, Rong-De Lu et al. This is
an open access article distributed under the Creative Commons Attribution
License, which permits unrestricted use, distribution, and reproduction in any
medium, provided the original work is properly cited.
How to Cite this Article
X. Ding, Y. Ren and R. Lu, "Maskless Microscopic Lithography through Shaping Ultraviolet Laser with Digital Micro-mirror Device,"
Optics and Photonics Journal, Vol. 3 No. 2B, 2013, pp. 227-231. doi:
10.4236/opj.2013.32B053.