High Moisture Sensitivity of the Elements Based on Carbon Nanotubes Array

Sergei Bulyarsky, Vyacheslav Galperin, Levan Ichkitidze, Michael Ermakov, Alexander Pavlov, Yuri Shaman

National Research University of Electronic Technology (MIET), Moscow, Russia.
nstitute of Nanotechnology of Microelectronics RAS, Moscow, Russia.
Scientific Manufacturing Complex “Technological Centre”, Moscow, Russia.
Ulyanovsk State University, Ulyanovsk, Russia.

DOI: 10.4236/msa.2013.45A002                

Abstract

The results of the research and development of the moisture-sensitive elements based on the carbon nanotubes (CNT) array are presented. It was shown that CNT arrays that were grown by low-temperature plasma enhanced chemical vapor deposition (PECVD) method on the planar Si structures exhibit extremely high moisture sensitivity. The structure resistance ratio in dry and moisture conditions exceed 400. Such relatively high change in resistances is conditioned by the pattern of change of the charge carrier’s conductivity between certain nanotubes in the bundle when water molecules adsorption occurs.

Keywords

Carbon Nanotubes; Moisture-Sensitive Elements; Conductivity; Molecules Adsorption

Conflicts of Interest

The authors declare no conflicts of interest.

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