Design and Analysis of a Novel Surface Acoustic Wave Micro Position Sensor
Kai Yang, Zhigang Li, Liwei Shang, Weidong Yi
DOI: 10.4236/jemaa.2011.311069   PDF    HTML     4,594 Downloads   7,828 Views   Citations


In order to realize the micromation of position sensors, and extend the application area into micro scale, this paper designs a novel micro position sensor, Mace SAW (Surface Acoustic Wave) position sensor, which can be fabricated with MEMS technology. Its key components are IDTs (Interdigital Transducers) and reflective grooves. The structure and working principles of the sensor are introduced theoretically, and the manufacture process is then put forward.

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K. Yang, Z. Li, L. Shang and W. Yi, "Design and Analysis of a Novel Surface Acoustic Wave Micro Position Sensor," Journal of Electromagnetic Analysis and Applications, Vol. 3 No. 11, 2011, pp. 439-442. doi: 10.4236/jemaa.2011.311069.

Conflicts of Interest

The authors declare no conflicts of interest.


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