Analysis of Cr Atoms Three-Dimensional Deposition Characteristics

Hua-Lei Yang, Wen-Tao Zhang, Jian Yang

.
桂林电子科技大学电子工程与自动化学院.

DOI: 10.4236/wjnse.2011.13011                

Abstract

The semi-classical model is used to simulate the three-dimensional trajectory and deposition distribution of the chromium atoms in the Gaussian laser standing wave field using the Runge-Kutta method, and then the three-dimensional deposition stripes are also given, besides, the effects of atomic beam divergence, chromatic aberration and spherical aberration on deposition structure are also analyzed.

Keywords

Three-Dimensional Analysis, Atom Deposition, Cr Atoms, Gaussian Laser Standing Wave Field

Conflicts of Interest

The authors declare no conflicts of interest.

References

[1]	T. B. Li, “Nanometrology and Transfer Standard,” Shanghai Measurement and Testing, Vol. 185, No. 1, 2005, pp. 8-13.
[2]	J. J. McClelland, R. E. Scholten, E. C. Palm, et al., “Laser-Focused Atomic Deposition,” Science, Vol. 262, No. 5135, 1993, pp. 877-880. doi:10.1126/science.262.5135.877
[3]	J. J. McClelland, R. Gupta, R. J. Celotta and G. A. Porkolab, “Nanostructure Fabrication by Reactive-Ion Etching of Laser-Focused Chromium on Silicon,” Applied Physics B, Vol. 66, No. 1, 1998, pp. 95-98. doi:10.1007/s003400050361
[4]	J. J. McClelland, W. R. Anderson, C. C. Bradley, et al., “Accuracy of Nanoscale Pitch Standards Fabricated by Laser-Focused Atomic Deposition,” Journal of Research of the National Institute of Standards and Technology, Vol. 108, No. 2, 2003, pp. 99-113.
[5]	J. J. McClelland, “Atom Optical Properties of a Standing-Wave Light Field,” Journal of the Optical Society of America B, Vol. 12, No. 10, 1995, pp. 1761-1768.
[6]	B. Ma, Y. Ma, M. Zhao, S.-S. Ma and Z.-S. Wang, “Simulation of Sodium Atom Deposition Pattern in a Laser Standing Wave Field,” Acta Physica Sinica, Vol. 55, 2006, pp. 668-672.
[7]	W. T. Zhang, “The Research of Laser Collimation and Deposition of Chromium Atomic Beam,” Tongji University, 2008.
[8]	B. H. Zhu, “The Research of Interaction and Deposition for Chromium Atoms in Laser Field,” Guangxi Normal University, 2008.
[9]	J. J. McClelland, “Atom Optical Properties of a Standing-Wave Light Field,” Journal of the Optical Society of America B, Vol. 12, No. 10, 1995, pp. 1761-1768. doi:10.1364/JOSAB.12.001761