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Synthesis and Characterization of Metal Organic Chemical Vapour Deposited Copper Titanium Oxide (Cu-Ti-O) Thin Films from Single Solid Source Precursor

DOI: 10.4236/jmp.2013.412A3001    3,538 Downloads   5,535 Views   Citations

ABSTRACT

Thin films of copper titanium oxide were deposited by metal organic chemical vapour deposition technique from the synthesized single solid source precursor, copper titanium acetylacatonate Cu [Ti(C5H7O2)3] at the deposition temperature of 420°C. The deposited films were characterized using Rutherford Backscattering Spectroscopy, Scanning Electron Microscopy with Energy Dispersive X-Ray facility attached to it, X-Ray Diffractometry, UV-Visible Spectrometry and van-der Pauw Conductivity measurement. Results show that the thickness of the prepared film is determined as 101.236 nm and the film is amorphous in structure, having average grain size of approximately 1 μm. The optical behaviour showed that the absorption edge of the film was at 918 nm near infrared with corresponding direct energy band gap of 1.35 eV. The electrical characterization of the film gave the values of resistivity, sheet resistance and conductivity of the film as 3.43 × 10-1 Ω-cm, 3.39 × 106 Ω/square and 2.91 (Ω-cm)-1 respectively.

Conflicts of Interest

The authors declare no conflicts of interest.

Cite this paper

O. Fasakin, M. Eleruja, O. Akinwunmi, B. Olofinjana, E. Ajenifuja and E. Ajayi, "Synthesis and Characterization of Metal Organic Chemical Vapour Deposited Copper Titanium Oxide (Cu-Ti-O) Thin Films from Single Solid Source Precursor," Journal of Modern Physics, Vol. 4 No. 12C, 2013, pp. 1-6. doi: 10.4236/jmp.2013.412A3001.

References

[1] W. Zhang, Y. Li, S. Zhu and F. Wang, Catalysis Today, 93, 2004, pp. 589-594.
http://dx.doi.org/10.1016/j.cattod.2004.06.009
[2] O. V. Komova, A. V. Simakov, V. A. Rogov, D. I. Kochubei, G. V. Odegova, V. V. Kriventsov, E. A. Paukshtis, V. A. Ushakov, N. N. Sazonova and T. A. Nikoro, Journal of Molecular Catalysis A: Chemical, Vol. 161, 2000, pp. 191-204.
http://dx.doi.org/10.1016/S1381-1169(00)00342-3
[3] B. O’Regan and M. Gratzel, Nature, Vol. 353, 1991, pp. 737-740. http://dx.doi.org/10.1038/353737a0
[4] K. Tennakone, G. R. R. A. Kumara, A. R. Kumarasinghe, K. G. U. Wijayantha and P. M. Sirimanne, Semiconductor Science and Technology, Vol. 10, 1995, pp. 1689-1693.
http://dx.doi.org/10.1088/0268-1242/10/12/020
[5] A. M. M. Gadalla and J. White, Transition British Ceramics Society, Vol. 65, 1966, p. 388.
[6] K. H. Yoon, W. J. Choi and D. H. Kang, Thin Solid Films, Vol. 372, 2000, p. 250.
http://dx.doi.org/10.1016/S0040-6090(00)01058-0
[7] A. Y. Oral, E. Mensur, M. H. Aslan and E. Basaran, Materials Chemistry and Physics, Vol. 83, 2004, p. 140.
http://dx.doi.org/10.1016/j.matchemphys.2003.09.015
[8] A. N. Banerjee and K. Chattopadhyay, “Progress in Crystal Growth and Characterization of Material,” Elsevier, Amsterdam, 2005.
http://dx.doi.org/10.1016/j.pcrysgrow.2005.10.001
[9] J. Rancourt, “Optical Thin Films (User’s Handbook),” McGraw-Hill, New York, 1987.
[10] M. Fleisher and H. Meixner, Sensor Actuators, Vol. B4, 1991, pp. 437-441.
[11] G. A. Battiston, R. Gerbasi, M. Porchia and A. Morigo, Thin Solid Films, Vol. 239, 1999, p. 186.
http://dx.doi.org/10.1016/0040-6090(94)90849-4
[12] D. Mergel, D. Buschendorf, S. Eggert, R. Grammes and B. Samset, Thin Solid Films, Vol. 371, 2000, pp. 218-224.
http://dx.doi.org/10.1016/S0040-6090(00)01015-4
[13] M. I. B. Bernadi, E. J. H. Lee, P. N. Lisboa, E. R. Leite, E. Longo and J. A. Varela, Materials Research, Vol. 4, 2001, pp. 223-226.
[14] J. B. Ellern and R. O. Ragsdale, Inorganic Syntheses, Vol. 11, 1968, p. 83.
[15] E. O. B. Ajayi, “Electrical and Optical Properties of Pyrolytically Deposited Indium Oxide,” M.Sc. Thesis, University of Illinois, Urbana, 1970.
[16] W. K. Chu, J. W. Mayer and M. A. Nicolet, “Backscattering Spectroscopy,” Academic Press, London, 1978.
[17] D. Kathirvel, N. Suriyanarayanan, S. Prabahar and S. Srikanth, Journal of Ovonic Research, Vol. 7, 2011, pp. 83-92.
[18] I. M. Tinginyanu, O. Lupan, U. V. Ursaki, L. Chow and M. Enachi, “Nanostructures of Metal Oxides, Semiconductor Science & Technology,” Elsevier, Amsterdam, 2011.
[19] F. Atay, V. Bilgin, I. Akyuz and S. Kose, Journal of Optoelectronics and Advanced Materials, Vol. 9, 2007, pp. 3604-3608.
[20] V. P. Zhuze and B. V. Kurchartor, Physikalische Zeitschrift der Sowjetunion, Vol. 2, 1932, pp. 453-467.
[21] S. R. Bryce, “Novel Uses of Titanium Dioxide for Silicon Solar Cells,” Ph.D. Thesis, University of New South Wales, Sydney, 2002.

  
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