Journal of Computer and Communications

Vol.4 No.3(2016), Paper ID 64117, 7 pages

DOI:10.4236/jcc.2016.43009

 

Automated Calibration of RF On-Wafer Probing and Evaluation of Probe Misalignment Effects Using a Desktop Micro-Factory

 

F. T. von Kleist-Retzow, T. Tiemerding, P. Elfert, O. C. Haenssler

 

Division Microrobotics and Control Engineering, University Oldenburg, Oldenburg, Germany
Group Automated Nanohandling, OFFIS, Institute for Information Technology, Oldenburg, Germany
Group Automated Nanohandling, OFFIS, Institute for Information Technology, Oldenburg, Germany
Division Microrobotics and Control Engineering, University Oldenburg, Oldenburg, Germany
Institutd’Electronique, de Microélectroniqueet de Nanotechnologie, CNRS/University of Lille, Lille, France

 

Copyright © 2016 F. T. von Kleist-Retzow, T. Tiemerding, P. Elfert, O. C. Haenssler et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

 

How to Cite this Article


Kleist-Retzow, F. , Tiemerding, T. , Elfert, P. and Haenssler, O. (2016) Automated Calibration of RF On-Wafer Probing and Evaluation of Probe Misalignment Effects Using a Desktop Micro-Factory. Journal of Computer and Communications, 4, 61-67. doi: 10.4236/jcc.2016.43009.

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