Journal of Crystallization Process and Technology

Vol.4 No.1(2014), Paper ID 41601, 6 pages

DOI:10.4236/jcpt.2014.41002

 

Remote-Plasma-Assisted Deposition of Pentacene Layer Using Atomic-Hydrogen

 

Satoshi Yamauchi, Takatoshi Minakuchi, Miyuki Onodera

 

Department of Biomolecular Functional Engineering, Ibaraki University, Hitachi, Japan
Department of Biomolecular Functional Engineering, Ibaraki University, Hitachi, Japan
Department of Biomolecular Functional Engineering, Ibaraki University, Hitachi, Japan

 

Copyright © 2014 Satoshi Yamauchi, Takatoshi Minakuchi, Miyuki Onodera et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

 

How to Cite this Article


S. Yamauchi, T. Minakuchi and M. Onodera, "Remote-Plasma-Assisted Deposition of Pentacene Layer Using Atomic-Hydrogen," Journal of Crystallization Process and Technology, Vol. 4 No. 1, 2014, pp. 14-19. doi: 10.4236/jcpt.2014.41002.

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