Soft Nanoscience Letters
Vol.3 No.3(2013), Paper ID 34627, 6
pages
DOI:10.4236/snl.2013.33009
Changing of Defect’s Structure and Properties of Superhard Nanostructured Ti-Si-N Coatings, Fabricated Using CPVD, before and after Annealing
Alexander D. Pogrebnjak, Oleksandr V. Bondar, Oleg V. Sobol, Vyacheslav M. Beresnev
Sumy State University, R.-Korsakov, Sumy, Ukraine
Sumy State University, R.-Korsakov, Sumy, Ukraine
Kharkov National Technical University, Kharkov, Ukraine
Kharkov
National University, Kharkov, Ukraine
Copyright © 2013 Alexander D. Pogrebnjak, Oleksandr V. Bondar, Oleg V. Sobol, Vyacheslav M. Beresnev et al. This is
an open access article distributed under the Creative Commons Attribution
License, which permits unrestricted use, distribution, and reproduction in any
medium, provided the original work is properly cited.
How to Cite this Article
Pogrebnjak, A. , Bondar, O. , Sobol, O. and Beresnev, V. (2013) Changing of Defect’s Structure and Properties of Superhard Nanostructured Ti-Si-N Coatings, Fabricated Using CPVD, before and after Annealing.
Soft Nanoscience Letters,
3, 46-51. doi:
10.4236/snl.2013.33009.