Materials Sciences and Applications

Vol.3 No.9(2012), Paper ID 22920, 5 pages

DOI:10.4236/msa.2012.39094

 

Preparation of Thin Films by a Bipolar Pulsed-DC Magnetron Sputtering System Using Ca3Co4O9 and CaMnO3 Targets

 

Weerasak Somkhunthot, Nuwat Pimpabute, Tosawat Seetawan

 

Program of Physics and Science Center, Faculty of Science and Technology, Loei Rajabhat University, Loei, Thailand
Program of Physics and Science Center, Faculty of Science and Technology, Loei Rajabhat University, Loei, Thailand
Thermoelectrics Research Center, Faculty of Science and Technology, Sakon Nakhon Rajabhat University, Sakon Nakhon, Thailand

 

Copyright © 2012 Weerasak Somkhunthot, Nuwat Pimpabute, Tosawat Seetawan et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

 

How to Cite this Article


W. Somkhunthot, N. Pimpabute and T. Seetawan, "Preparation of Thin Films by a Bipolar Pulsed-DC Magnetron Sputtering System Using Ca3Co4O9 and CaMnO3 Targets," Materials Sciences and Applications, Vol. 3 No. 9, 2012, pp. 645-649. doi: 10.4236/msa.2012.39094.

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