World Journal of Condensed Matter Physics

Vol.2 No.2(2012), Paper ID 19080, 6 pages

DOI:10.4236/wjcmp.2012.22009

 

The Effect of Deposition Temperature of Pb(Zr,Ti)O3(PZT)Thin Films with Thicknesses of around 100 nm on the Piezoelectric Response for Nano Storage Applications

 

Wook Song Han

 

Center for Mass and Related Quantities, Division of Physical Metrology, Korea Research Institute of Standards and Science, Daejeon, South Korea.

 

Copyright © 2012 Wook Song Han et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

 

How to Cite this Article


Han, W. (2012) The Effect of Deposition Temperature of Pb(Zr,Ti)O3(PZT)Thin Films with Thicknesses of around 100 nm on the Piezoelectric Response for Nano Storage Applications. World Journal of Condensed Matter Physics, 2, 51-56. doi: 10.4236/wjcmp.2012.22009.

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