Energy and Power Engineering

Vol.2 No.2(2010), Paper ID 1821, 5 pages

DOI:10.4236/epe.2010.22011

 

Dopant Implantation into the Silicon Substrate with Non-Planar Surface

 

Gennady A. Tarnavsky, Evgenii V. Vorozhtsov

 

 

Copyright © 2010 Gennady A. Tarnavsky, Evgenii V. Vorozhtsov et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

 

How to Cite this Article

G. Tarnavsky and E. Vorozhtsov, "Dopant Implantation into the Silicon Substrate with Non-Planar Surface," Energy and Power Engineering, Vol. 2 No. 2, 2010, pp. 73-77. doi: 10.4236/epe.2010.22011.
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