Materials Sciences and Applications
Vol.10 No.3(2019), Paper ID 91345, 11
pages
DOI:10.4236/msa.2019.103018
Nanostructure of Rutile TiO2 Thin Films Prepared on Unheated Substrate by Dual Cathode DC Unbalanced Magnetron Sputtering
Wichai Kongsri, Supanee Limsuwan, Surasing Chaiyakun, Pichet Limsuwan, Chittra Kedkaew
Department of Physics, Faculty of Science, King Mongkut’s University of Technology Thonburi, Bangkok, Thailand
Department of Physics, Faculty of Science, King Mongkut’s University of Technology Thonburi, Bangkok, Thailand
Department of Physics, Faculty of Science, Burapha University, Chonburi, Thailand
Department of Physics, Faculty of Science, King Mongkut’s University of Technology Thonburi, Bangkok, Thailand
Department of Physics, Faculty of Science, King Mongkut’s University of Technology Thonburi, Bangkok, Thailand
Copyright © 2019 Wichai Kongsri, Supanee Limsuwan, Surasing Chaiyakun, Pichet Limsuwan, Chittra Kedkaew et al. This is
an open access article distributed under the Creative Commons Attribution
License, which permits unrestricted use, distribution, and reproduction in any
medium, provided the original work is properly cited.
How to Cite this Article
Kongsri, W. , Limsuwan, S. , Chaiyakun, S. , Limsuwan, P. and Kedkaew, C. (2019) Nanostructure of Rutile TiO
2 Thin Films Prepared on Unheated Substrate by Dual Cathode DC Unbalanced Magnetron Sputtering.
Materials Sciences and Applications,
10, 216-226. doi:
10.4236/msa.2019.103018.